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AMAT 0090-07135 半导体电子分组卡

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AMAT 0090-07135半导体电子分组卡主要特点可以归纳如下:一、高性能高抽速率:AMAT 0090-07135具有高达1200 CFM的抽速率,能够迅速

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更新时间:2024-07-13
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AMAT 0090-07135半导体电子分组卡主要特点可以归纳如下:

一、高性能

  • 高抽速率:AMAT 0090-07135具有高达1200 CFM的抽速率,能够迅速将真空腔内的气体抽出,满足半导体制造过程中快速建立真空环境的需求。
  • 低噪音:噪音水平低于65 dB(A),确保了在生产环境中为操作人员提供相对安静的工作条件。
  • 低振动:振动小于0.1 g,有助于减少设备对周围环境的干扰,同时保护设备内部的精密部件免受振动损害。

二、长寿命与可靠性

  • 长寿命:设计寿命超过40000小时,确保了设备的长期稳定运行,降低了更换和维护的频率。
  • 高可靠性:采用成熟的设计和制造工艺,经过严格的质量控制和测试,确保设备在复杂多变的半导体制造环境中具有高度的可靠性。

三、易于维护与操作

  • 结构简单:AMAT 0090-07135的结构设计简洁明了,便于日常维护和故障排查。
  • 自动控制系统:配备自动控制系统,能够实现自动运行和故障报警,降低了人工干预的需求,提高了生产效率和安全性。

四、油气分离系统

  • 防止油雾污染:该设备配备油气分离系统,可有效防止油雾污染真空腔,确保半导体制造过程的清洁度和产品质量。

五、应用领域

  • 广泛应用于半导体制造:AMAT 0090-07135适用于各种半导体制造工艺,包括晶圆清洗、刻蚀、沉积、薄膜沉积和封装等,是半导体生产线上的重要设备之一。

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The main features of AMAT 0090-07135 semiconductor electronic packet card can be summarized as follows:


First, high performance

High pumping rate: The AMAT 0090-07135 has a pumping rate of up to 1200 CFM, which can quickly extract gas from the vacuum chamber to meet the need to quickly establish a vacuum environment during semiconductor manufacturing.

Low noise: Noise levels below 65 dB(A) ensure relatively quiet working conditions for operators in the production environment.

Low vibration: The vibration is less than 0.1g, which helps to reduce the interference of the equipment to the surrounding environment, while protecting the precision components inside the equipment from vibration damage.

Second, long life and reliability

Long life: Design life of more than 40,000 hours, to ensure the long-term stable operation of the equipment, reduce the frequency of replacement and maintenance.

High reliability: The use of mature design and manufacturing processes, through strict quality control and testing, to ensure that the equipment in the complex and changeable semiconductor manufacturing environment has a high degree of reliability.

3, easy to maintain and operate

Simple structure: AMAT 0090-07135 structure design is simple and clear, easy to daily maintenance and troubleshooting.

Automatic control system: Equipped with automatic control system, can achieve automatic operation and fault alarm, reduce the need for manual intervention, improve production efficiency and safety.

Four, oil and gas separation system

Prevention of oil mist pollution: The equipment is equipped with an oil and gas separation system, which can effectively prevent oil mist pollution of the vacuum chamber, ensuring the cleanliness of the semiconductor manufacturing process and product quality.

5. Application fields

Widely used in semiconductor manufacturing: AMAT 0090-07135 is suitable for a variety of semiconductor manufacturing processes, including wafer cleaning, etching, deposition, film deposition and packaging, and is one of the important devices in semiconductor production lines.


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